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股票代碼:002962
中文EN
021-32231289
半導(dǎo)體光學(xué)產(chǎn)品

ALD產(chǎn)品

技術(shù)規(guī)格
Equipment(設(shè)備) 詳情
ALD ALDER - 1000
Capacity(能力) Up to 45 φ300 wafers per batch (≥ 5hour per batch)
每批最多 45 φ300 個(gè)晶片(每批 ≥ 5 小時(shí))
Product Characteristics(產(chǎn)品特性) 詳情
Substarte Material(材料) Resin - based, glass - based, silicone - based substrate
樹(shù)脂基、玻璃基、硅基
Product Type(產(chǎn)品類(lèi)型) Various types of flat and aspherical mirror coating; wafer coating (within 12"); Shaped structure coating
各類(lèi)平片、非球面鏡鍍膜;晶圓鍍膜(12“以?xún)?nèi));異形結(jié)構(gòu)鍍膜
Coating material(鍍膜材料) SiO?, TiO?, Al?O?
Optical properties(光學(xué)特性) 詳情
Wavelength(工作波段) 420 - 700nm
Reflectivity(420 - 700nm)(反射(420 - 700nm)) Rmax<0.1%
Wide - angle(0°~40°)(大角度(0°~40°)) Rmax<0.5%
Appearance(外觀(guān)規(guī)格) 詳情
Appearance(外觀(guān)水平) Surface Particle:1.0~10um
表面 Particle:1.0~10um